Semiconductors, Silicon Wafers, Patterned Wafers
Film defects are areas missing film due to inadequate uniformity of coating distribution or from previous contamination left on the surface before the film was applied.
Larger areas of film defects can jeopardize the quality of the film layer or coating creating problems with film uniformity. On traditional microscopes, while it may appear that the film is uniform based on a small area of analysis, a full scan on the AT1 system can provide a more comprehensive view.
Each system is calibrated with PSL spheres on smooth silicon. This process demonstrates the instrument's ability to detect particles down to 70 nm.