Technological Innovation

The AT1 System is easy to use:

1. Once a sample is placed within the AT1 system, scanning will be completed within minutes.

2. Data collected will be analyzed and images and defect maps will be generated by the software, LuminaSoft.

3. Defects of interest may be scribed for further analysis on a scanning electron microscope (SEM), ellipsometer, microscope, etc.

1. Once the sample is placed in the system:

A 30 µm diameter green laser beam moves in a 50 mm line.

The sample moves perpendicularly to the laser.

The reflected and scattered light is captured by the four detectors.

Detection Channels

The AT1 has four detection channels. They operate simultaneously to generate four separate images. Each channel aids in detecting and classifying certain defects:

  • Polarization: Film Defects, Stains

  • Reflectivity: Scratches, Internal Stress*, Striations within Glass*

  • Slope: Scratches, Pits, Bumps, Surface Topography

  • Dark Field: Nanoparticles, Inclusions

*Reflectivity off of the top and bottom surfaces provides these results.

2. Analysis and Classification

LuminaSoft presents the images and classifies defects, providing information in a visual and easily accessible format. Reports may be saved as .csv files.

3. Diamond Scribe

The optional diamond scribe marks the defects of interest to facilitate further analysis using other instrumentation such as SEM (Scanning Electron Microscope).