Lumina AT1 System

The AT1 system is capable of scanning any flat shape less than or equal to 300 mm x 300 mm.

  • Resilient: Capable of scanning fragile and thin samples

  • Adaptable: Scans transparent (glass), semiconductor, or metal substrates.

  • Efficient: Full-surface scan of 150 mm wafer in 3 minutes.

  • Sensitive: 70 nm PSL sensitivity on silicon and 150 nm PSL sensitivity on glass.

Instrument Specifications

  • Temperature: 18 - 30 °C

  • Voltage:           120/230 VAC

  • Current:           6 A/4 A

  • Weight:            815 lbs/370 kg

  • Dimensions:   880 x 2005 x 743 mm

                              (34.6 x 79 x 29.2 in.)