Lumina AT2-EFEM System

The AT2-EFEM integrates the Lumina AT2 with an Equipment Front End Module (EFEM) to enable a fully automated production system for 300mm wafers with factory automation capability.

Instrument Specifications

  • Temperature: 25±5 °C
  • Voltage:           Single phase 220V AC ±10%
  • Current:           15A
  • Weight:            Approximately 2645lbs/1200kg
  • Dimensions:   2350 x1653 x 2181mm

                              (92.5 x 65.1 x 85.9 in.)